Innovative Organics’ deep involvement in the Hard Disk Drive (HDD) industry, especially in the development of ultra-precision consumables for the lapping and polishing of pico, 10^-12 and femto, 10^-15 scale Giant Magnetoresistive Recording heads and disk media, has helped in the development of precision coolants, lubricants, abrasive slurries and cleaners used in many critical machining processes for MEMS and NEMS device fabrication. 

 These ultra-precision AmberCut™  machining consumables are complimented with a broad spectrum of AmberClean™ cleaners with compatible chemistries.

The key to successful results in MEMS fabrication processes, in many instances, is dependent on the quality of the as-sawn, ground, lapped, polished or CMP’d (Chemo-Mechanically Polished/Planarized) and cleaned material surface(s).  Innovative Organics provides precision, biodegradable fluids, abrasive slurries and cleaners for all critical process steps.

MEMS are microelectromechanical systems comprising of micron-scale mechanical and electrical components. These three-dimensional micro devices can be designed for biological, chemical, optical or thermal applications and are used frequently as micro sensors. The term MEMS also refers to the fabrication processes that provide the means to build these devices with architecture ranging from 1 to 100 microns (10^-6 meter). NEMS or Nano - Tech devices refer to objects in the 100 – 1000 nanometer (10^-9 meter) scale and corresponding fabrication processes. MEMS are constructed using semiconductor fabrication processes that incorporate silicon, glass or other sacrificial substrate materials.

Typical fabrication processes include Surface Micromachining - SM, wet and dry Bulk Micromachining - BM, Lithographie, Galvanoformung (electroplating), Abformung (molding) - LIGA and High-Aspect-Ratio Micromachining - HARM. There are additional fabrication techniques for MEMS and NEMS devices including Micro Electrical Discharge Machining - MEDM, Focused Ion Beam Milling - FIBM, Laser Ablation - LA, Electron Beam Machining - EBM, Laser Polymerization and Deposition - LPD, Deep U/V Processes - DU/VP, Precision Micromechanical Machining – PMM, Single Point Diamond Machining – SPDM and Ultrasonic Machining – UM.

Innovative Organics’ technical specialist team encourages MEMS engineers to contact them to discuss their specific MEMS machining challenges.

Choose from the following products for the MEMS and Nano-Tech markets.