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Polishing Slurries and Particles

AmberCut™ ASL 590

Barrier Layer CMP Slurries

Polishing Slurries AmberCut™ ASL 590 slurries are high precision CMP slurries specifically formulated for the polishing of the barrier layers on read-write head wafers.  AmberCut ASL 590 utilizes Saint-Gobain's patented polycrystalline alumina abrasive particles which greatly enhance planarization rates and efficiency compared to colloidal silica and other competitive abrasives.  AmberCut ASL 590 slurries are designed with very high selectivities for barrier metals and can be chemically tuned for specific layer requirements to provide excellent control of device topography.  It is also formulated with special lubricants and surfactants which provide excellent surface finish and cleanability.  AmberCut ASL 590 slurries are colloidally stable and will not hard pack.

 

  • Provides very high barrier metal selectivities
  • Chemically tuneable to give excellent topography control
  • Gives excellent uniformity and surface finishes
  • Colloidally stable and does not hard pack for ease of use
  • Easily cleaned and does not leave films or residues
  • Outperforms silica slurries

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