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Polishing Slurries and Particles

AmberCut™ ASL 914

Head Wafer CMP Slurry

Polishing Slurries AmberCut™ ASL 914 is a high precision CMP slurry specifically formulated for use on the critical metal alloy layers of read-write head wafers.  AmberCut ASL 914 utilizes Saint-Gobain's patented polycrystalline alumina abrasive particles which greatly enhance planarization rates and efficiency compared to colloidal silica and other competitive abrasives.  It is also formulated with high efficiency accelerator chemistries which facilitate the control of metal removal rate.  Varying pH and peroxide concentrations allows positive topography control with high reproducibility. 

 

AmberCut ASL 914 also contains unique inhibitors that prevent corrosion of the highly sensitive alloys used in heat manufacturing.  Special lubricants and surfactants further provide excellent surface finish and cleanability.  AmberCut ASL 914 slurries have colloidal, oxidative and biological stability for enhanced ease of use.

 

  • Provides very high planarization efficiency and removal rates
  • Highly tuneable topography control by varying pH and peroxide
  • Inhibits corrosion of sensitive head alloys
  • Provides excellent surface finishes
  • Colloidal and biological stability facilitates ease of use
  • Oxidative stability allows supply of slurry at predetermined peroxide concentrations